Standard Bond Energies

major

Si–Cl 86
Si–O 110
http://www.cem.msu.edu/~reusch/VirtualText/react2.htm

Bulk Si-Cl bonds in SiO2 are not easily formed [32,33], since the Si-O binding energy of 8.3+-0.1 eV is larger than the 4.2 eV binding energy Si-Cl [34].
Nishikawa, Oomori, Ono, JVST B, 1999
[32] D. J. Oostra, R. P. van Ingen, A. Haring, A. E. de Vries, and G. N. A. van Veen, Appl. Phys. Lett. 50, 1506 (1987).
[33] D. J. Oostra, A. Haring, and A. E. de Vries, J. Vac. Sci. Technol. B 4, 1278 (1986).
[34] Handbook of Chemistry and Physics, 72nd ed., edited by D. R. Lide