RIE lag, inverse RIE lag
Observation of Microscopic Nonuniformity during Overetch in Polysilicon Gate Etching, Mutumi Tuda and Kouichi Ono, Jpn. J. Appl. Phys. Vol.36(1997) L518-L521
Moreover, it was predicted that simultaneous surface-inhibitor deposition during etching gives rise to the inverse RIE lag. (8,12)
[8] A. D. Bailey III et al. JVST B 13 (1995) 92
[12] A. D. Bailey III et al. JJAP 34 (1995) 2083
"reverse RIE lag"とも言うらしい
Examples include reverse reactive ion etching (RIE) lag and the smoothing of microscopic roughness in regions near a mask edge.
B. A. Helmer and D. B. Graves J. Vac. Sci. Technol. A 16 (1998) 3502