2004-10-25から1日間の記事一覧

温泉関係の興味を引いた本

誰も行けない温泉前人未湯 http://www.pre-proj.net/books/books1.html NHK知るを楽しむ「本物の温泉」 http://www.nhk.or.jp/shiruraku/200602/wednesday.html

Apache のアクセス制限

pc

.htaccess によるアクセス制限 http://dog.intcul.tohoku.ac.jp/unix/accs-rest.html

Dry Etching Si/SiO2 in F-Based Gases and Plasmas

Prominent etch chemistry in ICs & MEMS CF4 does not etch Si (does not chemisorb) but F2 gas will etch Si with etch products SiF2 and SiF4 Plasma is needed to generate F that must penetrate SiF2-like surface http://www2.ece.jhu.edu/faculty/…

plasma-surface interactions

search result by "surface oxidation" and "etching" http://www.ireap.umd.edu/ppm/Papers/psst00193.pdf http://www.ireap.umd.edu/ppm/publications.htm Study of plasma-surface interactions: chemical dry etching and high-density plasma etching A…