2004-09-24 profile simulation major 2002, Mahorowala et al. The domain was discretized into square cells with 25 A sides. → yield を計算する際のconstantの値は?Etch yield と Etch rate (Er=Δh/Δt)の関係 NΔh = Y ΓΔt N: 原子密度/ Y: yield