other previous profile simulation

Three-dimensional simulation of ion-enhanced dry-etch processes
Microelectronic Engineering, Volume 14, Issues 3-4, September 1991, Pages 269-281
Joachim Pelka

Controlled topography production—true 3D simulation and experiment • ARTICLE
Vacuum, Volume 46, Issues 8-10, August-October 1995, Pages 971-975
LB Jonsson, C Hedlund, IV Katardjiev, AM Barklund, H-O Blom and S Berg